Cs-Corrected Transmission Electron Microscopy (Cs-TEM)
Energy Dispersive Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
As the semiconductor industry advances through the extremely small (down to 3 nm) technology nodes, the needs for the super-high -resolution TEM becomes increases. Outermost’s service includes TEM imaging using aberration corrected TEM (Cs-TEM), whose resolution is at least 5 times better than the typical high-resolution TEM, at very affordable pricing. Accurate measurement of nano-scale film thickness is critical in the development of modern IC devices. Using our proprietary in-house TEM image analysis software, we provides most accurate measurement of the nano-scale film thickness and its uniformity.