Atomic Force Microscope (AFM)
Conductive AFM (c-AFM)
Scanning Capacitance Microscope (SCM)
Scanning Spread Resistance Microscope (SSRM)
c-AFM, SCM, and SSRM are all based on the AFM technology. With c-AFM, contact quality of metal electrodes to GaN can be analyzed through I-V curve. SCM shows active carrier distribution with operation bias applied. And SSRM shows the quantitative resistivity value which can be very useful in the development of new GaN materials. Use the pic below on its left side space.