Rutherford Backscattering (RBS)
Overview
Rutherford Backscattering (RBS) is a non-destructive quantitative technique that analyzes the elemental composition of the surface of thin films or bulk materials. This technique is based on the famous Rutherford gold-foil experiment, which used a linear beam of alpha particles to penetrate gold foil. While most of these particles passed through, some were backscattered and detected by the luminescent screen. In modern RBS analysis, the energy profile of the elastically backscattered 4H3+ particles are analyzed to collect various information on the sample.
The main application of RBS is to determine the purity of adjacent layers, quantify layer thickness, analyze the intermixing of layers, and understand defects within single crystal materials. The proper range of analysis depth is 1 nm ~ 1000 nm. If the film of interest is deposited on a stoichiometrically known surface, no reference sample is needed. In the case thin film, both stoichiometry and atomic density of the thin film can be determined. Here are some examples of when to use RBS analysis:
Services
There are several different modes in which different ion beams and detectors are used depending on the type of analysis required.
- RBS can be used to measure thin film composition up to 1 µm thick.
- Hydrogen Forward Scattering (HFS) can be used to measure the hydrogen profile in thin films and bulk materials.
- Nuclear Reaction Analysis (NRA) can be used to measure specific isotopes for accurate composition of elements such as B, C, N, & O (lighter elements).
- Particle-induced X-ray emission (PIXE) can be used to study the release of X-rays from the sample, which is good for trace contamination detection.
Pricing
- RBS: Starts from $800/sample, 3 – 5 days of turnaround time.
- RBS + HFS (Hydrogen): Starts from $950/sample, 3 – 5 days of turnaround time.
- RBS + HFS + NRA (B, C, N, and O): Starts from $1,200, 4 – 5 days of turnaround time.
Equipment
Nec Corp. – 6SDH-2
- Signal Detected: Backscattered He atoms
- Elements Detected: B-U
- Detection Limits: 0.001-10 at%
- Depth Resolution: 100-200 Å
- Imaging/Mapping: No
- Lateral Resolution/Probe Size: ≥ 2 mm
FAQ
A: RBS, or Rutherford Backscattering Spectrometry, is an analytical technique that measures the elemental composition and depth profiles of materials by bombarding them with high-energy ions and analyzing the backscattered ions.
A: RBS is applicable to a wide range of materials, including semiconductors, thin films, metals, and insulators.
A: RBS analysis provides data on the elemental composition, layer thicknesses, and depth profiles of materials, making it valuable for quality control and research purposes.
A: RBS is unique in its ability to provide precise elemental depth profiling and quantification without damaging the sample or altering its properties.
A: RBS offers high sensitivity, non-destructive testing, and the ability to analyze multi-layered structures, making it a valuable tool for materials characterization.
A: HFS is an advanced form of RBS that offers the detection of hydrogen which is hard to analyze quantitatively in other metrologies.
A: Nuclear Reaction Analysis (NRA) is a technique that uses nuclear reactions to probe the composition of materials. It provides information about specific isotopes and their concentrations.
A: NRA focuses on the detection of specific isotopes through nuclear reactions, while RBS provides information about elemental composition and depth profiling using backscattered ions.
A: PIXE, or Particle-Induced X-ray Emission, is an analytical technique that uses high-energy particles to excite atoms in a sample, causing them to emit characteristic X-rays that reveal elemental composition.
A: Yes, RBS and PIXE are often used in combination to provide comprehensive information about the elemental composition and depth profiles of materials.
A: Yes, NRA is highly sensitive and can be used to detect trace elements and isotopes in materials, making it valuable for applications like contamination analysis.
A: You can request these analysis services by contacting our team through our website or by phone. We’ll discuss your project’s specific requirements and provide customized solutions to meet your needs.
A: Yes, RBS, HFS, NRA, and PIXE are versatile techniques used in both research and quality control across various industries, including semiconductor manufacturing, materials science, and environmental analysis.